Effect of chemical environments on palladium phthalocyanine thin film sensors for humidity analysis
作者： Mohammad Javad Jafari , Mohammad Esmaeil Azim-Araghi , Samira Barhemat
DOI: 10.1007/S10853-011-5996-4
关键词:
摘要: Chemiresistors based on palladium phthalocyanine (PdPc) thin films were investigated as humidity sensors. The samples thermally evaporated onto gold electrodes with a thickness about 100 nm. Optical and electrical characteristics of PdPc by scanning electron microscopy (SEM), X-ray diffraction (XRD), measurements. SEM image demonstrates (30–60 nm) nanosized particles, XRD pattern shows that are in α-phase at room temperature. Electrical measurements also confirm exhibit semiconducting photoconducting behaviors, thermal activation energies calculated. After that, the sensitivity reversibility devices exposure to 20–90% RH various chemical environments 293 323 K. response time (35–45 s) recovery (75–105 sensors measured K respect different environments. At last, stability versus RH% tested. show very good for period 2 months but their has been reduced ethanol, acetone, ammonia
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