Micro movable device
作者： Hiroaki Yamazaki
DOI:
关键词: Auxiliary electrode 、 Substrate (printing) 、 Optoelectronics 、 Signal lines 、 Ground line 、 Electrode 、 Materials science 、 Electrical engineering
摘要: A micro movable device according to an embodiment of the present invention may include a signal line formed on support substrate, ground substrate and arranged side by with line, first driving electrode above second auxiliary electrode, which is space therebetween, supported substrate.
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