MEMS and method of manufacturing the same
作者： Tomohiro Saito
DOI:
关键词: Substrate (printing) 、 Electrode 、 Microelectromechanical systems 、 Auxiliary electrode 、 Materials science 、 Optoelectronics 、 Electrical engineering
摘要: According to one embodiment, a MEMS includes first electrode, auxiliary structure and second electrode. The electrode is provided on substrate. the substrate adjacent in an electrically floating state. above structure, driven direction of
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