MICRO-MOVABLE DEVICE AND MANUFACTURING METHOD FOR MICRO-MOVABLE DEVICE
作者： Yamazaki Hiroaki
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摘要: PROBLEM TO BE SOLVED: To reduce a drive voltage for driving movable part while suppressing increase of parasitic capacitance between signal line and line. SOLUTION: A electrode 16a is arranged on the 13, 16b grounding 14. An auxiliary 17a in parallel to 16a, an 17b 16b. 19 electrodes 17a, 17b. COPYRIGHT: (C)2011,JPO&INPIT
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