Micro-electro-mechanical-system (MEMS) resonator and manufacturing method thereof
作者： Akira Sato , Shogo Inaba
DOI:
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摘要: A micro-electro-mechanical-system resonator, includes: a substrate; fixed electrode formed on the and movable electrode, arranged facing driven by an electrostatic attracting force or repulsion that acts gap between electrode. An internal surface of support beam has inclined surface.
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