Mems device having an actuator with curved electrodes
作者： Dana R. Dereus , Shawn J. Cunningham
DOI:
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摘要: MEMS device (300) having an actuator (302, 306) with curved electrodes (308, 310). According to one embodiment of the present invention, is provided for moving actuating linearly. The includes a substrate (304) planar surface and movable in linear direction relative substrate. at least electrode beam (312, 314) attached end (304). flexible (322, 324) between Furthermore, 310) has aligned position adjacent length beam, whereby its substantially as moves fashion corresponding electrode.
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