A capacitive sensor and a method for manufacturing the capacitive sensor
作者： Jaakko Ruohio , Risto Mutikainen
DOI:
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摘要: The present invention relates to measuring devices for use in physical measuring, and particular capacitive sensors. In the sensor according invention, shape of stationary electrode (3), (4), (12), (17-20), (27-28) is stepped. By means a method manufacturing with improved linearity achieved, as well suitable particularly small solutions.
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