Apparatus for inspecting static electricity of substrate and method of manufacturing substrate
作者： Kyoung Hyo Kim , Jeong Hyun Ahn
DOI:
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摘要: An apparatus for inspecting static electricity of a substrate includes probe having substantially same shape as to be inspected, the including contact surface made conductive material, wiring connected and delivering collected by probe, measurement unit wiring, receiving from analyzing an intensity electricity.
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