Variable capacitance capacitor

摘要: PROBLEM TO BE SOLVED: To provide a variable capacitance capacitor having largely capacitance. SOLUTION: Leg sections 2a and 2b are formed on substrate 1 at an interval, support beam 3 is put the across space between 2b. Cantilevers 4 5 respectively extended to right left from intervals surface of 1, movable electrodes 6 7 surfaces cantilevers facing 1. In addition, drive electrode 11 oppositely faced 7, 10, detecting 12 with front end side cantilever 4. When Coulomb force generated 11, moves toward raised. in vertical direction, changes.