Method of manufacturing a micro-mechanical element
作者： Charles Gordon Smith , Robert Van Kampen , Andrew John Weeks , Jack Luo
DOI:
关键词: Base (geometry) 、 Composite material 、 Layer (electronics) 、 Mechanical elements 、 Conductive materials 、 Materials science 、 Structural engineering
摘要: A method of manufacturing a micromechanical element wherein the comprises steps providing layer base material, applying at least one partly sacrificial an etchable patterning layer, to define portion shape element, structural mechanical form and removing patterned release free element. The material is selected from group conductive materials.
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