Method for removing a sacrificial material with a compressed fluid
作者： Jason S. Reid , Nungavaram S. Viswanathan
DOI:
关键词:
摘要: A method comprises depositing an organic material on a substrate; additional different from the after material; and removing with compressed fluid. Also disclosed is comprising: providing layer layer, one or more layers of than layer; fluid; anti-stiction agent fluid to remaining removal layer.
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