Hinge structures for micro-mirror arrays
作者： Satyadev R. Patel , Robert M. Duboc , Jonathan C. Doan
DOI:
关键词: Robustness (computer science) 、 Optics 、 Hinge 、 Materials science 、 Fill factor 、 Micro mirror 、 Spatial light modulator 、 Contrast ratio 、 Optical modulator
摘要: A method and spatial light modulator are provided herein. The has a higher resolution an increased fill factor. also provides contrast ratio. Furthermore, the of present invention can be operated in absence polarized that improved electro-mechanical performance robustness with respect to manufacturing. its alternative disclosed herein by for manufacturing modulator.
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