NRBS, RBS, TEM and SAED characterisation of sol–gel PZT films
作者： D. Pantelica , F. Vasiliu , P. Ionescu , F. Negoita
DOI: 10.1016/J.NIMB.2005.06.166
关键词: Texture (crystalline) 、 Oxidizing agent 、 Pyrolysis 、 Analytical chemistry 、 Fluorite 、 Selected area diffraction 、 Sol-gel 、 Chemical engineering 、 Materials science 、 Layer (electronics) 、 Stoichiometry
摘要: Abstract TEM-SAED investigations were performed on PZT films, to elucidate the role of pyrolysis conditions orientation selection. For short pyrolysis, occurrence metastable fluorite and interfacial PtxPb template layer are factors inducing (1 1 1) orientation. advanced TiO2 could be responsible for (1 0 0) strong To further investigate stoichiometry layers, we heavy ion RBS NRBS measurements. Only a substoichiometric TiO2−x is found pyrolized film whereas two Ti O rich layers observed pyrolysis. The thicker oxygen bottom layer, by TEM analysis, lead 〈1 0 0〉 texture, oxidizing at interface during
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