Controlling the oxygen species density distributions in the flowing afterglow of O2/Ar–O2 surface-wave microwave discharges

摘要: The evolution of species densities along a reactor radially positioned on an O2 surface-wave microwave discharge is investigated by means modelling with the aim to define density tuning possibilities. validity models shown comparison calculated and measured axial distribution O-atoms. calculations revealed that due perpendicular injection plasma into reactor, gas temperature close room in most it, except for 5?cm region around inlet. It pressure drop tube, which results change flow rate, induces variation relative active entering where kept constant. surface recombination probability atoms varies afterglow tube gradient, as well conditioning resulting from continuous operation system. system be very practical applications surfaces/porous materials are treated homogeneously pumping through them, since rate equidensity surfaces can obtained case two abundant species, O-atoms O2(a) molecules. In at pressures investigated, i.e. 100 50?Pa, similar, their while molecules decreases considerably pressure.