Low-pressure gas breakdown in combined fields

作者: V A Lisovsky , V D Yegorenkov

DOI: 10.1088/0022-3727/27/11/014

关键词: Rf dischargeRange (particle radiation)MechanicsChemistryElectric fieldAnalytical chemistry

摘要: … gases from breakdown curyes obtained by the authors are given. We have investigated the effect of the oc electric field on the RF breakdown … theoretically the gas breakdown in uniform …

参考文章(26)
H. Vora, T. J. Moravec, Structural investigation of thin films of diamondlike carbon Journal of Applied Physics. ,vol. 52, pp. 6151- 6157 ,(1981) , 10.1063/1.328514
K. R. Stalder, C. A. Anderson, A. A. Mullan, W. G. Graham, Time‐resolved optical emission and electron energy distribution function measurements in rf plasmas Journal of Applied Physics. ,vol. 72, pp. 1290- 1296 ,(1992) , 10.1063/1.351735
Arthur A. Varela, Effect of Direct-Current Potential on Initiation of Radiofrequency Discharge Physical Review. ,vol. 71, pp. 124- 125 ,(1947) , 10.1103/PHYSREV.71.124
J. R. Ligenza, Silicon Oxidation in an Oxygen Plasma Excited by Microwaves Journal of Applied Physics. ,vol. 36, pp. 2703- 2707 ,(1965) , 10.1063/1.1714565
Sanborn Brown, High-Frequency Gas-Discharge Breakdown Proceedings of the IRE. ,vol. 39, pp. 1493- 1501 ,(1951) , 10.1109/JRPROC.1951.273635
Donald H. Hale, The Breakdown of Gases in High Frequency Electrical Fields Physical Review. ,vol. 73, pp. 1046- 1052 ,(1948) , 10.1103/PHYSREV.73.1046
S. N. Sen, B. Bhattacharjee, BREAKDOWN OF A RADIO-FREQUENCY DISCHARGE IN THE PRESENCE OF A SUPERIMPOSED d-c. FIELD Canadian Journal of Physics. ,vol. 43, pp. 1543- 1551 ,(1965) , 10.1139/P65-143