作者: V A Lisovsky , V D Yegorenkov
DOI: 10.1088/0022-3727/27/11/014
关键词: Rf discharge 、 Range (particle radiation) 、 Mechanics 、 Chemistry 、 Electric field 、 Analytical chemistry
摘要: … gases from breakdown curyes obtained by the authors are given. We have investigated the effect of the oc electric field on the RF breakdown … theoretically the gas breakdown in uniform …