Time‐resolved optical emission and electron energy distribution function measurements in rf plasmas
作者： K. R. Stalder , C. A. Anderson , A. A. Mullan , W. G. Graham
DOI: 10.1063/1.351735
关键词:
摘要: Comparisons between experimentally measured time‐dependent electron energy distribution functions and optical emission intensities are reported for low‐frequency (100 400 kHz) radio‐frequency driven discharges in argon. The were with a time‐resolved Langmuir probe system. Time‐resolved emissions of argon resonance lines at 687.1 750.4 nm determined by photon‐counting methods. Known ground‐state metastable‐state excitation cross sections used along the to calculate time dependence intensity. It was found that calculation using only gave best agreement emission. Time‐dependent density, temperature, plasma potential measurements also reported.
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