Optical emission spectroscopy of reactive plasmas: A method for correlating emission intensities to reactive particle density
作者： J. W. Coburn , M. Chen
DOI: 10.1063/1.328060
关键词:
摘要: The addition of a small concentration suitably chosen noble gas to reactive plasma is shown permit the determination functional dependence particle density on parameters. Examples illustrating simplicity this method are presented using F atomic emission from plasma‐etching discharges and comparison made available data in literature.
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