PE-CVD of Organic Thin Films with Controlled Surface Concentration of Carboxylic Groups
作者： Fabio Palumbo , Pietro Favia , Annalisa Rinaldi , Michele Vulpio , Riccardo d'Agostino
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摘要: Organic thin films have been deposited onto various substrates by means of radiofrequency glow discharges fed with acrylic acid vapors. The effect the experimental parameters on film composition has investigated X-ray Photoelectron and FT-IR spectroscopies; Optical Emission Spectroscopy carried out for plasma phase characterization. It is shown that concentration oxygen carboxylic groups in coating decreases increasing power, while trend CO species increases. demonstrated from acid, which can be used as functional layers biomolecule immobilization, a controlled surface -COOH through simple situ monitoring deposition process.
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