Performance of silicon micromachined waveguide at W-band
作者： J.P. Becker , J.R. East , L.P.B. Katehi
DOI: 10.1049/EL:20020457
关键词: Silicon 、 Waveguide 、 Materials science 、 Anisotropic etching 、 Fabrication 、 Horn antenna 、 Optics 、 W band
摘要: Fabrication and measurement of low-loss micromachined waveguides developed in [001] silicon through wet anisotropic etching is detailed. Such are candidates for use submillimetre-wave systems owing to their compatibility with both efficient horn antenna elements planar-based circuitry.
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