Silicon Micromachining Technology for Passive THz Components
作者： C. Lee , A. Peralta , C. Jung , G. Chattopadhyay , I. Mehdi
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摘要: Silicon micromachined terahertz passive components such as silicon washers, waveguide blocks for W-band (75-110 GHz) power amplifiers, and waveguides 325-500 GHz band have been designed, microfabricated, characterized. Based on these results, an integrated 600 RadiometerOn-a-Chip (ROC) has demonstrated the first time. It reduced in mass by order of magnitude compared to conventional metal machining.
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