Micromachining for Advanced Terahertz: Interconnects and Packaging Techniques at Terahertz Frequencies

作者: Maria Alonso-del Pino , Cecile Jung-Kubiak , Theodore Reck , Choonsup Lee , Goutam Chattopadhyay

DOI: 10.1109/MMM.2019.2945157

关键词: Terahertz radiationSurface micromachiningMaterials scienceManifold (fluid mechanics)Current (fluid)OptoelectronicsInterconnection

摘要: … waveguide (CPW), and rectangular waveguides normalized by their wavelength. At frequencies above 100 GHz, rectangular waveguides … of planar circuits and waveguide filters,” IEEE …

参考文章(53)
C. Lee, A. Peralta, C. Jung, G. Chattopadhyay, I. Mehdi, R. Lin, B. Thomas, Silicon Micromachining Technology for Passive THz Components Twenty-First International Symposium on Space Terahertz Technology. pp. 342- 344 ,(2010)
Choonsup Lee, Goutam Chattopadhyay, Cecile Jung, Theodore Reck, Ken Cooper, Alex Peralta, R. Lin, I. Mehdi, Maria Alonso del Pino, Nuria Llombart Juan, Silicon microlens antenna for multi-pixel THz heterodyne detector arrays european conference on antennas and propagation. pp. 1745- 1746 ,(2013)
H. Knoepfle, T. M. Bloomstein, J. Capara, J. E. Curtin, A. Hungerford, J. Glenn, C. K. Walker, S. T. Palmacci, M. B. Stern, G. Narayanan, LASER MICROMACHINING OF SILICON: A NEW TECHNIQUE FOR FABRICATING HIGH QUALITY TERAHERTZ WAVEGUIDE COMPONENTS' Softwaretechnik-trends. pp. 358- ,(1997)
T. Yoneyama, S. Nishida, Nonradiative Dielectric Waveguide for Millimeter-Wave Integrated Circuits IEEE Transactions on Microwave Theory and Techniques. ,vol. 29, pp. 1188- 1192 ,(1981) , 10.1109/TMTT.1981.1130529
A. Pavolotsky, D. Meledin, C. Risacher, M. Pantaleev, V. Belitsky, Micromachining approach in fabricating of THz waveguide components Microelectronics Journal. ,vol. 36, pp. 683- 686 ,(2005) , 10.1016/J.MEJO.2005.04.041
Denis Buchel, Patrick Putz, Karl Jacobs, Michael Schultz, Urs U. Graf, Christophe Risacher, Heiko Richter, Oliver Ricken, Heinz-Wilhelm Hubers, Rolf Gusten, Cornelia E. Honingh, Jurgen Stutzki, 4.7-THz Superconducting Hot Electron Bolometer Waveguide Mixer IEEE Transactions on Terahertz Science and Technology. ,vol. 5, pp. 207- 214 ,(2015) , 10.1109/TTHZ.2014.2382434
Xiaobang Shang, Maolong Ke, Yi Wang, Michael J. Lancaster, WR-3 Band Waveguides and Filters Fabricated Using SU8 Photoresist Micromachining Technology IEEE Transactions on Terahertz Science and Technology. ,vol. 2, pp. 629- 637 ,(2012) , 10.1109/TTHZ.2012.2220136
Yuan Li, Imran Mehdi, Alain Maestrini, Robert H Lin, John Papapolymerou, A Broadband 900-GHz Silicon Micromachined Two-Anode Frequency Tripler IEEE Transactions on Microwave Theory and Techniques. ,vol. 59, pp. 1673- 1681 ,(2011) , 10.1109/TMTT.2011.2123112
Lynda E. Busse, Catalin M. Florea, Jesse A. Frantz, L. Brandon Shaw, Ishwar D. Aggarwal, Menelaos K. Poutous, Rajendra Joshi, Jas S. Sanghera, Anti-reflective surface structures for spinel ceramics and fused silica windows, lenses and optical fibers Optical Materials Express. ,vol. 4, pp. 2504- 2515 ,(2014) , 10.1364/OME.4.002504
N. Llombart, C. Lee, M. Alonso-delPino, G. Chattopadhyay, C. Jung-Kubiak, L. Jofre, I. Mehdi, Silicon Micromachined Lens Antenna for THz Integrated Heterodyne Arrays IEEE Transactions on Terahertz Science and Technology. ,vol. 3, pp. 515- 523 ,(2013) , 10.1109/TTHZ.2013.2270300