Silicon Micromachined Lens Antenna for THz Integrated Heterodyne Arrays
作者： N. Llombart , C. Lee , M. Alonso-delPino , G. Chattopadhyay , C. Jung-Kubiak
DOI: 10.1109/TTHZ.2013.2270300
关键词: Lens (optics) 、 Surface micromachining 、 Optoelectronics 、 Etching (microfabrication) 、 Materials science 、 Photolithography 、 Silicon 、 Optics 、 Waveguide 、 Fabrication 、 Antenna (radio)
摘要: In this paper, we present the design, fabrication, and measurements of a lens THz antenna that can be fabricated using conventional photolithography deep reactive etching processes. The is composed an extended hemispherical silicon leaky wave waveguide feed. Both elements are micromachining techniques, enabling fabrication future large arrays with parallel process. To show concept, first prototype has been Measurements obtained at 550 GHz presented.
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