Terahertz antenna arrays with silicon micromachined-based microlens antenna and corrugated horns

摘要: We report on two silicon based antennas for future large-format THz focal plane imaging arrays. The silicon-based corrugated horn antenna shows return loss below 15 dB and gain over 20 in the 320–360 GHz frequency band. 1.9 microlens has been designed microfabricated. simulated good 2-D beam radiation pattern aperture efficiencies around 85%. It is clear that will work well 1 THz. However, it would be difficult to fabricate such at frequencies beyond due requirement of thin wafers which handle during microfabrication. On other hand, can range 300 GHz–2 or even higher because excellent tolerances achievable with microfabrication techniques. One major advantage these batch processing techniques one get hundreds a single run, thus reducing fabrication cost time.