BEOL thin film resistor
作者： Wu Ernest Y , Li Baozhen , Kim Andrew Tae , Yang Chih-Chao
DOI:
关键词: Optoelectronics 、 Integrated circuit 、 Embedding 、 Materials science 、 Dielectric layer 、 Resistive touchscreen 、 Resistor 、 Line (electrical engineering) 、 Thin film
摘要: Back end of the line precision resistors that allow for high currents and configuration as an eFuse by embedding a single thin film resistive metal material within dielectric layer, wherein resisters are coupled to sidewalls adjacent interconnects described. The can be formed in one (M1) layer M1 interconnects. Also described processes fabricating integrated circuits including and/or e-Fuses.
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