***WITHDRAWN PATENT AS PER THE LATEST USPTO WITHDRAWN LIST***Target for laser produced plasma extreme ultraviolet light source
作者： Robert J. Rafac , Yezheng Tao
DOI:
关键词: Laser 、 Light source 、 Plasma 、 Extreme ultraviolet 、 Optics 、 Materials science
摘要:
参考文章(3)
Oleh Khodykin, Alexander N. Bykanov, Laser produced plasma euv light source with pre-pulse ,(2006)
Mark S. Tillack, Yezheng Tao, Light source employing laser-produced plasma ,(2007)
Oscar Hemberg, Lars Rymell, Magnus Berglund, Hans Hertz, Björn Hansson, Method and arrangement for producing radiation ,(2003)