Depletion regions in the aluminum-induced layer exchange process crystallizing amorphous Si

作者: Jens Schneider , Juliane Klein , Martin Muske , Stefan Gall , Walther Fuhs

DOI: 10.1063/1.1996849

关键词: Amorphous siliconNucleationAmorphous solidChemical physicsMaterials scienceCrystallizationNanocrystalline siliconEutectic systemSiliconSupercoolingCrystallographyPhysics and Astronomy (miscellaneous)

摘要: Annealing of aluminum/amorphous silicon bilayers below the eutectic temperature aluminum/silicon system leads to an exchange layer positions and a concurrent crystallization (aluminum-induced exchange). This letter discusses model for self-limited suppression nucleation during process. characteristic feature is reason why large grain sizes can be obtained. In our experiments, we combine caused by supersaturation undercooling. Si depletion regions around existing grains are made visible. These experiments give direct proof idea that occurs in aluminum-induced

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