MoSx-Ta composite coatings on steel by d.c magnetron sputtering

摘要: Abstract Sputter-deposited MoS 2 films have been often used as dry lubricant in various industrial fields, such space application and much attention has paid to reduction of friction coefficient improvement mechanical properties recent decades. One way achieve this is deposit a film doped with another metal. The x -metal were found be denser, more adhesive oxidation-resistant than pure . In study, -Ta composite synthesized by Electron Cyclotron Resonance microwave source enhanced DC sputtering different target powers. effects doping Ta on investigated. morphology structure investigated using scanning electron microscope (SEM), X-ray diffraction (XRD) atomic force microscopy (AFM). microhardness was evaluated test instrument, the adhesion strengths obtained scratch tester. results showed that S/Mo ratio influenced dc power. Typical (100) (103) (002) orientations present films, but disappeared increase Ta, content ratios decreasing from 1.52 0.84, hardness increasing 3.55 15.23 GPa. roughness surface topography, significantly affected Mo S content. plays dominant role change Mo/S ratio, thereby influencing tribological films.