A miniature Fabry-Perot interferometer fabricated using silicon micromachining techniques

摘要: The techniques of silicon micromachining have been used to fabricate a miniature Fabry-Perot interferometer for use in the near infrared spectral region. device consists two wafers with deposited, highly reflective dielectric mirrors. are bonded together small gap between mirrors, and sawed into individual devices. wavelength tuning parallelism control mirror elements achieved electrostatically, by varying voltage electrodes. measured finesse structure exceeds 90 at 1.4 mu m, resulting FWHM optical bandwidth 3.1 nm. These devices expected find application as laser intercavity elements, demultiplexers fiber optic telecommunications system, sensors pressure acceleration. >