Removal Process Of Ceramic Materials With Excimer Laser Radiation

摘要: Because of its specific features, shortest pulses with highest pulse power, excimer laser radiation seems to be suitable for processing ceramics. It reveals high surface quality and enables a 2- or 3-dimensional structuring in the field micro machining. This paper deals interaction process between ceramic materials radiation. The effect different beam parameters on removal result affected zone respectively further capabiltities material UV-radiation various industrial applications are discussed.