Dynamics of collisionless rf plasma sheaths
作者： Paul A. Miller , Merle E. Riley
DOI: 10.1063/1.365732
关键词: Poisson's equation 、 Plasma 、 Ion 、 Debye length 、 Debye sheath 、 Plasma diagnostics 、 Atomic physics 、 Computational physics 、 Plasma etching 、 Chemistry 、 Biasing
摘要: … the plasma sheaths to be included within an electrical model of the plasma and external rf … electrodes, which are in contact with the plasma. The model is a significant advance beyond …
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