Overview of Plasma Diagnostic Techniques
作者： G. A. Hebner , P. A. Miller , J. R. Woodworth
DOI: 10.1007/978-3-642-56989-0_5
关键词:
摘要: Plasma diagnostics is a broad area of technology that encompasses diverse, venerable field experimental techniques designed to provide information about the characteristics plasma. Plasmas used in microelectronics processing fall into category low temperature plasmas. Typical plasma include electron densities between 109 and 1012 cm-3, temperatures from 0.1 10 eV, pressures few Torr millitorr or below excitation frequencies dc microwave. These parameters span relatively wide range conditions make selection best diagnostic tools challenging.
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