Effect of C2H2/N2 partial pressure ratio on microstructure and mechanical properties of Ti-Al-Si-C-N coatings
作者： Jiabin Gu , Liuhe Li , Hu Miao , Yi Xu , Ye Xu
DOI: 10.1016/J.SURFCOAT.2018.06.035
关键词: Coating 、 Materials science 、 Composite material 、 Microstructure 、 Deposition (law) 、 Sputtering 、 Partial pressure 、 Nanocomposite 、 Tribology 、 Cemented carbide
摘要: Abstract Ti-Al-Si-C-N nanocomposite coatings were deposited on cemented carbide (WC-10 wt%, Co) substrates by reactive magnetron sputtering technique. The effect of C2H2/N2 partial pressure ratio element concentration, deposition rate, microstructure, cross-sectional morphology, hardness and tribological properties the studied. found to have a structure consisting nanocrystallities (Ti,Al)(C,N) amorphous phase. coating's columnar crystals was restrained with increase ratio. rates nanohardness firstly increased reached their maximum values 133 nm/min 35 Gpa, respectively, at 1:2 before decreasing. friction coefficient wear dramatically decreased lowest value 0.17 1.1 × 10–6 mm3/Nm, 1:1.
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