Microelectromechanical load sensor and methods of manufacturing the same

摘要: A microelectromechanical ("MEMS") load sensor device (10) for measuring a force applied by human user is described herein. In one aspect, the has contact surface (11) in communication with touch which communicates forces originating on to deformable membrane (13), elements are arranged, such that produces signal proportional imparted along surface. another an overload protection ring protect from excessive forces. embedded logic circuitry allow microcontroller individually address devices organized into array. electrical and mechanical connectors as solder bumps designed minimize cost of final component manufacturing.