Measurement system and lithographic apparatus for measuring a position dependent signal of a movable object
作者： Engelbertus Antonius Fransiscus Van Der Pasch , Marc Wilhelmus Maria Van Der Wijst , Koen Jacobus Johannes Maria Zaal
DOI:
关键词: Artificial intelligence 、 Position sensor 、 Object (computer science) 、 Compensation (engineering) 、 Signal 、 Frame (networking) 、 Engineering 、 Position (vector) 、 System of measurement 、 Mount 、 Computer vision
摘要: An encoder-type measurement system is configured to measure a position dependent signal of movable object, the including at least one sensor mountable on object target substantially stationary frame, and mounting device mount frame. The further includes compensation compensate movements and/or deformations with respect may include passive or an active damping feedback control system. In alternative embodiment, gripping which fixes during high accuracy movement object.
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