High resolution electron backscatter diffraction with a field emission gun scanning electron microscope.
作者： Brough I , Humphreys Fj
DOI:
关键词: Materials science 、 Optics 、 Field emission gun 、 Environmental scanning electron microscope 、 Electron beam-induced deposition 、 Scanning Hall probe microscope 、 Scanning electron microscope 、 Scanning transmission electron microscopy 、 Microscope 、 Conventional transmission electron microscope
摘要: A scanning electron microscope with a thermal field emission gun (FEGSEM) is found to offer significant improvements in backscatter diffraction performance over conventional W-filament microscope. The spatial resolution improved by factor of approximately 3 the FEGSEM and optimized at probe currents 50-300 nA 10-15 keV. angular accuracy above 150 30
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