Design and Development of Tunable Filters for MEMS Adaptive Infrared Detectors

摘要: The combination of MEMS and high performance infrared (IR) detector technology offers a unique opportunity for new solutions to major challenges faced by wide range defense, commercial, communication, biomedical instrumentation, environmental monitoring applications. Tunable Fabry-Perot filters are core components in adaptive detectors. filter the overall device integrity significantly influenced design structure materials used key structural elements. mechanical analysis FP structures means finite element modeling is presented. characterization material, low temperature PECVD silicon nitride, determination its properties reported. Finally, fabricated array demonstrated.