Optical cantilever based analysis
作者： Dilusha Silva , Lorenzo Faraone , Roger Jeffery , Adrian John Keating , Gino Michael Putrino
DOI:
关键词: Cantilever 、 Optics 、 Materials science 、 Microelectromechanical systems 、 Resonant cavity 、 Grating
摘要: An optical sensor including a MEMS structure, and grating coupled resonating structure positioned adjacent to the comprising an interrogating coupler configured direct light towards structure. The is two dimensional, form resonant cavity.
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