Synchrotron-based XPS studies of AlGaN and GaN surface chemistry and its relationship to ion sensor behaviour

作者: Farah Liyana Muhammad Khir , Matthew Myers , Anna Podolska , Tarun Maruthi Sanders , Murray V Baker

DOI: 10.1016/J.APSUSC.2014.07.002

关键词: Etching (microfabrication)ChlorideX-ray photoelectron spectroscopyIonOxideMaterials scienceContext (language use)HeterojunctionAnalytical chemistryReference electrode

摘要: … tendency to attach to the GaN surface relative to the AlGaN … For GaN and AlGaN surfaces, a linear response (eg source-… We have shown that our XPS investigations are consistent …

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