作者: Farah Liyana Muhammad Khir , Matthew Myers , Anna Podolska , Tarun Maruthi Sanders , Murray V Baker
DOI: 10.1016/J.APSUSC.2014.07.002
关键词: Etching (microfabrication) 、 Chloride 、 X-ray photoelectron spectroscopy 、 Ion 、 Oxide 、 Materials science 、 Context (language use) 、 Heterojunction 、 Analytical chemistry 、 Reference electrode
摘要: … tendency to attach to the GaN surface relative to the AlGaN … For GaN and AlGaN surfaces, a linear response (eg source-… We have shown that our XPS investigations are consistent …