Optical position measuring instrument
作者： Michael Hermann , Karsten Sändig , Wolfgang Holzapfel
DOI:
关键词: Materials science 、 Polarizer 、 Optics 、 Orthogonal polarization spectral imaging 、 Grating 、 Polarization (waves) 、 Measuring instrument 、 Light source 、 Beam (structure)
摘要: An optical position measuring instrument including a scanning plate and scale, wherein the scale are movable relative to one another. The grating light source that emits beam toward grating, receives splits into two partial beams with orthogonal polarization states. polarizer being arranged in paths of beams, has structure generate effects on striking periodically variable, period variable is greater than graduation grating. reunified resultant beam. A detection unit generates plurality displacement-dependent signals.
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