Photoelectric encoder and method of manufacturing scales
作者： Takashi Kanno , Kenichi Kojima , Atsushi Tominaga
DOI:
关键词: Engineering drawing 、 Etching 、 Metal 、 Resist 、 Materials science 、 Tungsten 、 Substrate (electronics) 、 Layer (electronics) 、 Diffraction grating 、 Optoelectronics 、 Chromium
摘要: A first metal layer of tungsten is formed on a substrate in scale. second chromium the layer. The selectively removed with mask resist and an etching stopper to form optical grating.
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