Nonlinear forced response of piezoelectric microcantilevers with application to tapping mode atomic force microscopy
作者： Rachael McCarty , S. Nima Mahmoodi
DOI: 10.1117/12.2044481
关键词: Non-contact atomic force microscopy 、 Equations of motion 、 Frequency response 、 Multiple-scale analysis 、 Atomic force acoustic microscopy 、 Acoustics 、 Nanotechnology 、 Materials science 、 Normal mode 、 Contact force 、 Piezoelectricity
摘要: Atomic Force Microscopy (AFM) uses a scanning process performed by microcantilever beam to create three dimensional image of nano-scale physical surface. AFM includes probe with tip at the end that is controlled in order keep force between and surface constant changing distance from Some microcantilevers have layer piezoelectric material on one side for actuation purpose. An accurate understanding motion tip-sample needed generate imaging. In this paper, equations an are derived nonlinear contact force. The analytical expressions natural frequencies mode shapes determined. Then, frequency response found using method multiple scales. effects excitation probe’s amplitude been analytically studied. nonlinearities lead shift response. Accurately modeling during significant consideration generation more
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