Piezoelectric PZT Cantilever Array Integrated with Piezoresistor for High Speed Operation and Calibration of Atomic Force Microscopy

摘要: Two kinds of PZT cantilevers integrated with a piezoresistor have been newly designed, fabricated, and characterized for high speed AFM. In first cantilever, is used to sense atomic force acting on tip, while in second calibrate hysteresis creep phenomena the cantilever. The fabricated provide tip displacement 0.55µm/V resonant frequency 73 kHz. A new cantilever structure has designed prevent electrical coupling between sensor actuator proposed shows 5 times lower voltage than that previous crisp scanned image at 1mm/sec, conventional piezo-tube scanner blurred even 180µm/sec. non-linear properties are also well calibrated using piezoresistive calibration.