Mass Sensitivity of Nonuniform Microcantilever Beams

摘要: Microelectromechanical systems (MEMS) based cantilever beams have been widely used in various sensing applications. Previous studies aimed at increasing the sensitivity of biosensors by reducing size to nanoscale. However, influence nonuniform on mass has rarely investigated. In this paper, we discuss with respect linear and nonlinear response beam quartic variation width. To do analysis, use Euler-Bernoulli equation harmonic forcing. Subsequently, derive mode shape corresponding linear, undamped, free vibration case for different types a tip end. After applying boundary conditions, obtain resonance frequencies magnitudes kinds beams. Galerkin approximation method multiple scales (MMS). Analysis indicates that nondimensional increases considerably changing planar geometry as compared uniform beam. At same time, further when is actuated higher modes. Similarly, frequency shift peak amplitude given exponentially decreases quadratically tapering parameter, a, diverging converging width, respectively. For beam, also found an interesting monotonically decreasing behavior parameter giving extremum point alpha = 0.5. Overall analysis potential application width biomass sensor.