Frequency-tunable micromechanical oscillator
作者： M. Zalalutdinov , B. Ilic , D. Czaplewski , A. Zehnder , H. G. Craighead
DOI: 10.1063/1.1326035
关键词:
摘要: An experimental method, employing a scanning tunneling microscope (STM) as an actuator and electron (SEM) motion detector, was developed to study microelectromechanical systems (MEMS) has been applied microfabricated cantilever beams. Vibrations actuated by ac voltage the piezodrive are transferred sample STM tip, which also provides constraint at drive location, altering fundamental mode of oscillation. A continuous change in resonant frequency is achieved varying position tip. In contrast few percent tunability previously demonstrated for MEMS oscillators, we have varied over 300% range.
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