Nanofabrication and electrostatic operation of single-crystal silicon paddle oscillators

作者: S. Evoy , D. W. Carr , L. Sekaric , A. Olkhovets , J. M. Parpia

DOI: 10.1063/1.371656

关键词: NanotechnologyFrequency responseExcitationMolecular physicsSilicon on insulatorQ factorSiliconQuality (physics)Torsion constantMaterials scienceNonlinear system

摘要: We report the fabrication and characterization of paddle oscillators featuring nanometer-scale supporting rods. The devices show two resonances in 1–10 MHz range, which we attribute to translational torsional modes motion. While frequency response motion shows evidence nonlinear behavior, remains symmetric throughout range excitation. present a model for electrostatic excitation modes. Torsional is induced via asymmetries system, amplified by modulation effective constant. predicts behavior displacements as small 15 nm. Analysis both consistently suggests structures softer than expected from bulk silicon. Quality factors approaching 103 are measured.

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