Micro resonant force gauges
作者： Harrie A.C. Tilmans , Miko Elwenspoek , Jan H.J. Fluitman
DOI: 10.1016/0924-4247(92)80194-8
关键词:
摘要: A review of micro resonant force gauges is presented. theoretical description given operating in a flexural mode vibration, including discussion non-linear effects. Gauge factor and quality are defined their relevance discussed. Performance issues such as sensitivity, stability resolution addressed. Design aspects, the means for excitation detection examples silicon microfabrication technologies described.
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