A surface micromachined resonant beam pressure sensor
作者： P. Melvas , E. Kalvesten , G. Stemme
DOI: 10.1109/MEMSYS.2001.906473
关键词: Bar (unit) 、 Surface (mathematics) 、 Analytical chemistry 、 Chip size 、 Surface micromachining 、 Diaphragm (mechanical device) 、 Sensitivity (electronics) 、 Pressure sensor 、 Materials science 、 Optoelectronics 、 Beam (structure)
摘要: The first entirely surface micromachined resonant beam pressure sensor is presented. Using a fully process an encapsulated with sensitive diaphragm of 100/spl times/150/spl times/2 /spl mu/m has been fabricated. resonating enclosed inside the reference vacuum cavity formed beneath diaphragm. new design enables high sensitivity and miniature chip size, essential for sensors such as catheter mounted intravascular blood sensors. measured to 3.2%/bar resonance frequency at about 700 kHz.
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