MEMS oscillating squeeze-film pressure sensor with optoelectronic feedback
作者： Lalit Kumar , Klaus Reimann , Martijn J Goossens , Willem F A Besling , Robin J Dolleman
DOI: 10.1088/0960-1317/25/4/045011
关键词:
摘要: This work reports on an oscillating pressure sensor that converts into frequency using the squeeze-film effect. A new aspect is laser Doppler vibrometer (LDV) in optoelectronic feedback loop used to bring element sustained mechanical oscillation. phase shifter and automatic gain control circuit stabilize The stability of investigated by measuring its Allan deviation compared performance a quartz sensor. Finally, resolution this conventional sensors.
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sci-hub.se 参考文章(33)
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