Development of a miniature pressure transducer for biomedical applications
作者： Wen Hsiung Ko , J. Hynecek , S.F. Boettcher
关键词:
摘要: … A u S n alloy, an absolute pressure transducer is formed. With the present … pressure transducer is presented, with suggestions on the design direction for miniature pressure transducers …
harvard.edu
sci-hub.se 参考文章(7)
O. N. Tufte, P. W. Chapman, Donald Long, Silicon Diffused-Element Piezoresistive Diaphragms Journal of Applied Physics. ,vol. 33, pp. 3322- 3327 ,(1962) , 10.1063/1.1931164
George Wallis, Daniel I. Pomerantz, Field Assisted Glass‐Metal Sealing Journal of Applied Physics. ,vol. 40, pp. 3946- 3949 ,(1969) , 10.1063/1.1657121
Samaun, Kensall D. Wise, James B. Angell, An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation IEEE Transactions on Biomedical Engineering. ,vol. BME-20, pp. 101- 109 ,(1973) , 10.1109/TBME.1973.324170
D. R. Kerr, A. G. Milnes, Piezoresistance of Diffused Layers in Cubic Semiconductors Journal of Applied Physics. ,vol. 34, pp. 727- 731 ,(1963) , 10.1063/1.1729524
R. M. Finne, D. L Klein, A Water‐Amine‐Complexing Agent System for Etching Silicon Journal of The Electrochemical Society. ,vol. 114, pp. 965- 970 ,(1967) , 10.1149/1.2426793
J. J. Wortman, R. A. Evans, Young's Modulus, Shear Modulus, and Poisson's Ratio in Silicon and Germanium Journal of Applied Physics. ,vol. 36, pp. 153- 156 ,(1965) , 10.1063/1.1713863
W. G. Pfann, R. N. Thurston, Semiconducting Stress Transducers Utilizing the Transverse and Shear Piezoresistance Effects Journal of Applied Physics. ,vol. 32, pp. 2008- 2019 ,(1961) , 10.1063/1.1728280