Resonant microbeam strain transducers
作者： J.D. Zook , D.W. Burns , H. Guckel , J.J. Sniegowski , R.L. Engelstad
DOI: 10.1109/SENSOR.1991.148930
关键词:
摘要: Vacuum-enclosed resonant microbeam elements 200 or 400 mu m long and 1.8 thick have been fabricated using LPCVD (low-pressure chemical vapor deposited) mechanical-grade polysilicon. The fundamental frequency overtone frequencies of the beams measured, with 550 kHz, 1.2, 2.2, 5.2 MHz typical 1D bending modes for length. Q-values determined gain/phase analysis vary from less than 10 to over 25,000 devices tested. Closed-loop operation piezoresistive sense electrostatic drive has achieved AGC prevent excessive drive. differential equation motion a doubly clamped single-span beam an axial load can be solved analytically lateral natural mode shapes. These solutions verified by finite element methods. In addition, models were used identify both torsional modes. closed-form are compared numerical results experimental data. >
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